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N. P. Sandler

Lam Research

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Deposition, annealing and characterisation of high-dielectric-constant metal oxide films

1995 Advanced Materials for Optics and Electronics
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Deposition, annealing and characterisation of high-dielectric-constant metal oxide films

1995 Advanced Materials for Optics and Electronics
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Low‐Pressure chemical vapour deposition of tantalum pentoxide films for ulsi devices using tantalum pentaethoxide as precursor

1992 Advanced Materials for Optics and Electronics
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