Old Web
English
Sign In
Acemap
>
authorDetail
>
I. Koo
I. Koo
Varian Semiconductor
Aluminum fluoride
Residue (complex analysis)
Doping
Plasma
Remote plasma
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Using a remote plasma source for n-type Plasma Doping chamber cleans
2014
A. Srivastava
A. Wilson
I. Koo
Show All
Source
Cite
Save
Citations (0)
1