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Claudio Spaggiari
Claudio Spaggiari
Axcelis Technologies
Annealing (metallurgy)
Ion implantation
Dopant
CMOS
Silicon
2
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2
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Silicon defects characterization for low temperature ion implantation and RTA process
2015
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
Diego Martirani Paolillo
Giovanni Margutti
Marco De Biase
M. Barozzi
D. Giubertoni
Claudio Spaggiari
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Silicon defects characterization for low temperature ion implantation and spike anneal processes
2014
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
Giovanni Margutti
Diego Martirani Paolillo
Marco De Biase
Luca Latessa
M. Barozzi
Evgeny Demenev
Leonard Rubin
Claudio Spaggiari
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