author-photo

Paul M. Dentinger

University of Wisconsin-Madison

6

Papers

30

Citations

Citation Trend

Filter By

Papers (5) Sort By

Journal Conference Others

Evaluation of photoacid generators in chemically amplified resists for x-ray lithography using an on-wafer photoacid determination technique

1999
Show All
- Source
- Cite
- Save
Citations (4)
Photoacid generator study for a chemically-amplified negative resist for high resolution lithography

1998
Show All
- Source
- Cite
- Save
Citations (0)
Imaging of photogenerated acid in a chemically amplified photoresist

1998 Applied Physics Letters
Show All
- Source
- Cite
- Save
Citations (22)
Photoacid generator study for chemically amplified negative resists for high-resolution lithography

1998
Show All
- Source
- Cite
- Save
Citations (0)
Quantitative analysis of chemically amplified negative photoresist using mirror-backed infrared reflection absorption spectroscopy

1995
Show All
- Source
- Cite
- Save
Citations (3)