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Kock Khuen Seet
Kock Khuen Seet
Hitachi
Scanning electron microscope
Magnification
Photolithography
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Papers
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Long-term critical dimension measurement performance for a new mask CD-SEM, S-9380M
2007
Zhigang Wang
Kock Khuen Seet
Ritsuo Fukaya
Yasuhiro Kadowaki
Noriaki Arai
Makoto Ezumi
Hidetoshi Satoh
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Citations (7)
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