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Iad Mirshad
Iad Mirshad
KLA-Tencor
Annealing (metallurgy)
Analytical chemistry
Materials science
Dopant Activation
Photochemistry
3
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4
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22nm node n+ SiC stressor using deep PAI+C 7 H 7 +P 4 with laser annealing
2009
RTP | International Conference on Advanced Thermal Processing of Semiconductors
John Borland
Masayasu Tanjyo
Nariaki Hamamoto
Tsutomu Nagayama
Shankar Muthukrishnan
Jeremy Zelenko
Iad Mirshad
Walt Johnson
Temel Buyuklimanli
Hiroshi Itokawa
Ichiro Mizushima
Kyoichi Suguro
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Citations (1)
22nm node p+ junction scaling using B 36 H 44 and laser annealing with or W/O PAI
2009
RTP | International Conference on Advanced Thermal Processing of Semiconductors
John Borland
Masayasu Tanjyo
Nariaki Hamamoto
Tsutomu Nagayama
Shankar Muthukrishnan
Jeremy Zelenko
Iad Mirshad
Walt Johnson
Temel Buyuklimanli
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Citations (3)
High Resolution Monitoring of Implant and Anneal Uniformity Using Therma-Probe Technology
2008
ASMC | Advanced Semiconductor Manufacturing Conference
Derrick Shaughnessy
Iad Mirshad
Alex Salnik
Lena Nicolaides
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