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K. Kakushimal
K. Kakushimal
Analytical chemistry
Leakage (electronics)
Annealing (metallurgy)
Plasma
Sheet resistance
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ULTRA-SHALLOWJUNCTIONFORMATIONBYPLASMADOPING AND FLASHLAMPANNEALING
2006
Yuichiro Sasaki
C-G. Jin
H. Sauddin
K. Majimal
Y. Fukagawal
I. Aiba
Hiroyuki Ito
Bunji Mizuno
K. Kakushimal
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