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Magoshi Shunko
Magoshi Shunko
proximity effect correction
thesaurus
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Photomask
Computer science
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EIDECにおけるHSFET(高開口数小型フィールド露光ツール)の現状 | 文献情報 | J-GLOBAL 科学技術総合リンクセンター
2016
Tanaka Satoshi
Magoshi Shunko
Kawai Hidemi
Inoue Soichi
Rosenthal Wylie
Girard Luc
Marchetti Lou
Kestner Bob
Kincade John
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Optimization method of proximity effect correction parameters on photomasks.
1996
Ito Masamitsu
Magoshi Shunko
Nakasugi Tetsuo
Kamikubo Takashi
Abe Takayuki
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