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Kamikubo Takashi
Kamikubo Takashi
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Computer science
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Electron Beam Mask Writer EBM-9500 for Logic 7nm Node Generation
2016
Matsui Hideki
Kamikubo Takashi
Nakahashi Satoshi
Nomura Haruyuki
Nakayamada Noriaki
Suganuma Mizuna
Kato Yasuo
Yashima Jun
Katsap Victor
Saito Kenichi
Kobayashi Ryoei
Miyamoto Nobuo
Ogasawara Munehiro
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hp16nm/ロジック11nmノード世代のEBマスク描画装置EBM-9000の描画時間推定
2014
Kamikubo Takashi
Takekoshi Hidekazu
Ogasawara Munehiro
Yamada Hirokazu
Hattori Kiyoshi
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Optimization method of proximity effect correction parameters on photomasks.
1996
Ito Masamitsu
Magoshi Shunko
Nakasugi Tetsuo
Kamikubo Takashi
Abe Takayuki
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