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Thomas John Cardinali
Thomas John Cardinali
IBM
Electron-beam lithography
Resist
Materials science
Lithography
Optics
2
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Enhancement of KRS-XE for 50 keV Advanced Mask Making Applications
2002
Karen Petrillo
David R. Medeiros
J. Bucchignano
Marie Angelopoulos
Dario L. Goldfarb
Wu-Song Huang
Wayne M. Moreau
Robert Lang
Chester Huang
Christina Deverich
Thomas John Cardinali
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Early mask results of KRS-XE and current progress in improving sensitivity and etch resistance
2002
Christina Deverich
Andrew J. Watts
Paul A. Rabidoux
Thomas John Cardinali
William A. Aaskov
Peter Levin
Wu-Song Huang
Wayne M. Moreau
Marie Angelopoulos
Karen Petrillo
David Madeiros
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