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Taku Ninomiya

Hitachi

7

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15

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High-voltage CD-SEM-based application to monitor 3D profile of high-aspect-ratio features

2020 Journal of Micro-nanolithography Mems and Moems
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High voltage CD-SEM based metrology for 3D-profile measurement using depth-correlated BSE signal

2019
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Inspection-analysis Solution for High-quality and High-efficiency Device Manufacturing

2005
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Focusing and leveling based on wafer surface profile detection with interferometry for optical lithography

1994
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Citations (7)