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Hung‐Yu Liu
Hung‐Yu Liu
Oxide
Microstructure
Thin film
Sputtering
Titanium
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Effect of Ar Sputter Etch on the Texture of Ti and Al/TiN/Ti Metal Stack
1997
Journal of The Electrochemical Society
Wei-Yung Hsu
Qi-Zhong Hong
Hung‐Yu Liu
Monte A. Douglas
Kelly J. Taylor
Lissa K. Magel
J.D. Luttmer
Robert H. Havemann
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