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hidehiro yanagawa
hidehiro yanagawa
Semiconductor device
Substrate (chemistry)
Electronic engineering
processing methods
Materials science
4
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The substrate processing apparatus, a pod switchgear, manufacturing method of a substrate processing method and a semiconductor device
2010
kou gi nakazima
kenkyuu matunaga
hidehiro yanagawa
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基板処理装置、ポッド開閉装置、基板処理方法および半導体装置の製造方法
2010
Tatsuhisa Matsunaga
Takayoshi Nakajima
Hidehiro Yanagawa
kou gi nakazima
kenkyuu matunaga
hidehiro yanagawa
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Method of transporting a substrate, the substrate processing method, a manufacturing method and a substrate processing apparatus of a semiconductor device
2008
kou gi nakazima
kenkyuu matunaga
hidehiro yanagawa
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縦型φ300mm装置Zestone-3(C)の開発
2001
tosimitu urabe
hidehiro yanagawa
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