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kenkyuu matunaga
kenkyuu matunaga
Materials science
Semiconductor device
Substrate (chemistry)
Electronic engineering
processing methods
5
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The substrate processing apparatus, a pod switchgear, manufacturing method of a substrate processing method and a semiconductor device
2010
kou gi nakazima
kenkyuu matunaga
hidehiro yanagawa
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基板処理装置、ポッド開閉装置、基板処理方法および半導体装置の製造方法
2010
Tatsuhisa Matsunaga
Takayoshi Nakajima
Hidehiro Yanagawa
kou gi nakazima
kenkyuu matunaga
hidehiro yanagawa
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Method of transporting a substrate, the substrate processing method, a manufacturing method and a substrate processing apparatus of a semiconductor device
2008
kou gi nakazima
kenkyuu matunaga
hidehiro yanagawa
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Heat treatment apparatus and a semiconductor manufacturing method
2002
tenhou yamaguti
kenkyuu matunaga
kazuhiro jou man
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Molded parts of the production system
1991
sadao oohara
takesi kawana
tatuya sinke
kenkyuu matunaga
yasuo sibasaki
yuuzi enomoto
sin hasizume
takesi yano
tosiyuki amimoto
yasuhiro fuzita
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