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Ming Hui Fan
Ming Hui Fan
Chartered Semiconductor Manufacturing
Materials science
Coating
Composite material
Optoelectronics
Resist
6
Papers
9
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Integration using KrF and ArF resist materials in a full via first dual-damascene process scheme with CVD OSG low-k dielectric
2002
Scott Jessen
Kurt George Steiner
Thomas Michael Wolf
William D. Josephson
Steven Alan Lytle
Mitsuru Satô
Chung Yih Lee
Ming Hui Fan
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Improve the accuracy and sensitivity of CD-SEM linewidth measurement for deep-submicron polygate pattern transfer
1999
Xin Mei
Ming Hui Fan
Alex Tsun-Lung Cheng
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Elimination of bottom-pinching effect in environmentally stable chemically amplified resists
1998
Choi Pheng Soo
Ming Hui Fan
A. J. Bourdillon
Lap Chan
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Resist profile and CD control improvement by using optimized resist thickness and substrate film stack ratio for 0.35-um logic process
1997
Ming Hui Fan
Raymond Yu
Ron-Fu Chu
Chet Ping Lim
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