Old Web
English
Sign In
Acemap
>
authorDetail
>
Chung Yih Lee
Chung Yih Lee
Chartered Semiconductor Manufacturing
Resist
Nanotechnology
Electronic engineering
Engineering
Wafer
5
Papers
2
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Integration using KrF and ArF resist materials in a full via first dual-damascene process scheme with CVD OSG low-k dielectric
2002
Scott Jessen
Kurt George Steiner
Thomas Michael Wolf
William D. Josephson
Steven Alan Lytle
Mitsuru Satô
Chung Yih Lee
Ming Hui Fan
Show All
Source
Cite
Save
Citations (1)
Critical structure characterization in 0.25-μm metal masking
1999
Chung Yih Lee
Wei Wen Ma
Sajan R. Marokkey
Alex Tsun-Lung Cheng
Show All
Source
Cite
Save
Citations (0)
Resist-profile-dependent photobias and in-line DICD control strategy
1999
Chung Yih Lee
Thian Teck Ong
Ma Wei Wen
Alex Tsun-Lung Cheng
Lin Yih Shung
Show All
Source
Cite
Save
Citations (1)
Stepper NA/PC optimization DOE for i-line masking
1998
Chung Yih Lee
Wei Wen Ma
Alex Tsun-Lung Cheng
Kia Huat Gan
Show All
Source
Cite
Save
Citations (0)
1