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D Sarkar
D Sarkar
Université du Québec
Electron temperature
Ion implantation
Sputtering
Analytical chemistry
Atomic physics
1
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3
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Co-axial ECR plasma system for radioactive ion implantation
2005
Plasma Sources Science and Technology
Marc-André Fortin
F. Marion
B.L. Stansfield
R.W. Paynter
D Sarkar
A.H. Sarkissian
B. Terreault
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