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S.W. Whitehair
S.W. Whitehair
IBM
X-ray lithography
Optics
Lithography
Light scattering
Wafer
2
Papers
9
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Light scattering properties of X-ray lithography mask substrates
1991
Microelectronic Engineering
Juan R. Maldonado
Y. Vladimirsky
O. Vladimirsky
Inna V. Babich
R. Fuentes
D. Guarnieri
S.W. Whitehair
J. Cuomo
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Citations (2)
Optical properties of x‐ray lithography masks
1990
Journal of Vacuum Science & Technology B
Y. Vladimirsky
Juan R. Maldonado
O. Vladimirsky
A. Starikov
R. Fuentes
D. Guarnieri
S.W. Whitehair
J. J. Cuomo
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Citations (7)
1