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Cembella Shaun
Cembella Shaun
Dry etching
Analytical chemistry
Etching (microfabrication)
Titanium nitride
Silicon nitride
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Thermal gas-phase etching of titanium nitride (TiN) by thionyl chloride (SOCl2)
2021
Applied Surface Science
Sharma Varun
Tom E. Blomberg
Suvi Haukka
Cembella Shaun
Michael Givens
Marko Tuominen
Odedra Rajesh
Wes Graff
Mikko Ritala
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