Old Web
English
Sign In
Acemap
>
authorDetail
>
Jalmar Thoresen
Jalmar Thoresen
Royal Institute of Technology
Extreme ultraviolet
Xenon
Laser
Optics
Extreme ultraviolet lithography
4
Papers
67
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Characterization of a liquid-xenon-jet laser-plasma extreme-ultraviolet source
2004
Review of Scientific Instruments
Björn A. M. Hansson
O. Hemberg
Hans M. Hertz
Magnus Berglund
Hee-June Choi
Björn Jacobsson
Emmanuelle Janin
Sofia Mosesson
Lars Rymell
Jalmar Thoresen
Martin Wilner
Show All
Source
Cite
Save
Citations (25)
Liquid-Xenon-Jet Laser-Plasma Source for EUV Lithography
2001
Bjoern A. M. Hansson
Lars Rymell
Magnus Berglund
Oscar E. Hemberg
Emmanuelle Janin
Jalmar Thoresen
Hans M. Hertz
Show All
Source
Cite
Save
Citations (12)
1