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M. Oryoshi
M. Oryoshi
Nagasaki University
Microstructure
Sputtering
Wafer dicing
Nuclear magnetic resonance
Surface micromachining
2
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10
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Si基板上に堆積した100μmを超える厚みのNd-Fe-B膜磁石
2015
IEEE Transactions on Magnetics
Masaki Nakano
Y. Chikuba
M. Oryoshi
A. Yamashita
Takeshi Yanai
Ryogen Fujiwara
Tadahiko Shinshi
Hirotoshi Fukunaga
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Nd–Fe–B Film Magnets With Thickness Above 100 ${\mu }\text{m}$ Deposited on Si Substrates
2015
INTERMAG | IEEE International Magnetics Conference
Masaki Nakano
Y. Chikuba
M. Oryoshi
Akihiro Yamashita
Takeshi Yanai
Ryogen Fujiwara
Tadahiko Shinshi
H. Fukunaga
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