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H. Gonzalez

Fairchild Semiconductor International, Inc.

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Characterizing electron shower with CHARM(R)-2 wafers on Eaten NV-8200P medium current ion implanter

1999 Sealing Technology
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Monitoring charging in high current ion implanters yields optimum preventive maintenance schedules and procedures

1999 Sealing Technology
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Monitoring C h Current Ion Implanters Yields Optimum Preventive Maintenance Schedules And Procedures

1998 International Integrated Reliability Workshop
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Characterizing electron shower with CHARM(R)-2 wafers on Eaton NV-8200P medium current ion implanter

1998 IIRW | International Integrated Reliability Workshop
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Monitoring charging in high current ion implanters yields optimum preventive maintenance schedules and procedures

1998 IIRW | International Integrated Reliability Workshop
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