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Seiichi Kimura
Seiichi Kimura
Kumamoto University
Spin coating
Physics
Boundary layer
Wafer
Photoresist
6
Papers
3
Citations
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Effect of catch cup geometry on 3D boundary layer flow over the wafer surface in a spin coating
2008
Journal of Thermal Science
Mizue Munekata
Seiichi Kimura
Hiroaki Kurishima
Jinsuke Tanaka
Sohei Yamamoto
Hiroyuki Yoshikawa
Kazuyoshi Matsuzaki
Hideki Ohba
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Effect of spin-up acceleration on onset of transient vortices over rotating wafer
2008
Transactions of the Japan Society of Mechanical Engineers. B
Seiichi Kimura
Hiroyuki Yoshikawa
Mizue Munekata
Hiroaki Kurishima
Sohei Yamamoto
Hideki Ohba
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4111 A Study on Boundary Layer Flow over a Wafer Surface in Spin Coating System
2006
Seiichi Kimura
Mizue Munekata
Zinsuke Tanaka
Hiroaki Kurishima
Hiroyuki Yoshikawa
Hideki Ohba
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Influences of the exhaust flow on the boundary layer flow on the wafer surface in spin coating system
2005
Journal of Thermal Science
Seiichi Kimura
Mizue Munekata
Hiroaki Kurishima
Kazuyoshi Matsuzaki
Hideki Ohba
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A Study on Ekman Spirals on a Rotating Disk in Spin Coating System (1st Report, Flow Visualization and Hot-Wire Measurement)
2004
Seiichi Kimura
Taichiro Mori
Kazuyoshi Matsuzaki
Mizue Munekata
Hiroaki Kurishima
Hideki Ohba
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