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4111 A Study on Boundary Layer Flow over a Wafer Surface in Spin Coating System
4111 A Study on Boundary Layer Flow over a Wafer Surface in Spin Coating System
2006
Seiichi Kimura
Mizue Munekata
Zinsuke Tanaka
Hiroaki Kurishima
Hiroyuki Yoshikawa
Hideki Ohba
Keywords:
Wafer
Composite material
Ceramic materials
Boundary layer
Materials science
Spin coating
Flow (psychology)
Correction
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