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Kuoaki Hung
Kuoaki Hung
National Sun Yat-sen University
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Extreme ultraviolet lithography
Extreme ultraviolet
Stress (mechanics)
Optics
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2024
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Investigation of EUV pellicle mechanical stress within EUV pod
2021
Ching-Te Kuo
Kuoaki Hung
Claire Lee
Chuang Chia-Ho
Bill Chiu
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