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Kwo-Shu Huang
Kwo-Shu Huang
TSMC
Dielectric
Electronic engineering
Metal
Engineering
Vacancy defect
3
Papers
2
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0
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BTI and Electron Trapping in Hf-based Dielectrics with Dual Metal Gates
2007
IRPS | International Reliability Physics Symposium
Y. T. Hou
J.C. Liao
Peng-Fu Hsu
C. L. Hung
Kang-Cheng Lin
Kwo-Shu Huang
Tze-Liang Lee
Y. K. Fang
Mong-Song Liang
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A study of implant damage induced thin oxide film expansion during photoresist dry etching
2000
IRPS | International Reliability Physics Symposium
Kuang-Peng Lin
Kai-Ming Ching
Kwo-Shu Huang
Shun-Liang Hsu
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A study of stress voiding effect on AlSi metal bank allowed lifetime for IC foundry fabs
1998
IIRW | International Integrated Reliability Workshop
Kuang-Peng Lin
Chai-Der Chang
Kwo-Shu Huang
Shun-Liang Hsu
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