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Paul M. Feeney
Paul M. Feeney
Materials science
Crystallography
Physics
semiconductor chip
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2
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10
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0
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CMP Solutions for the Integration of High-K Metal Gate Technologies
2010
Jeffrey Dysard
Vlasta Brusic
Paul M. Feeney
Steven Grumbine
Kevin Moeggenborg
Glenn Whitener
William Ward
Gregory Burns
Kyose Choi
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Citations (10)
Bond island support structure in semiconductor chip
2001
Bette L. Bergman Reuter
John J. Ellis-Monaghan
Paul M. Feeney
Robert M. Geffken
Howard S. Landis
Rosemary A. Previti-Kelly
Matthew J. Rutten
Anthony K. Stamper
Sally J. Yankee
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