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Sakata Atsuko
Sakata Atsuko
Materials science
Electromigration
Metal
Interconnection
Metallurgy
3
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Nanocarbon Interconnects : Aiming to replace ultra-fine metal interconnects
2012
Technical report of IEICE. SDM
Kajita Akihiro
Wada Makoto
Saito Tatsuro
Kitamura Masayuki
Yamazaki Yuichi
Katagiri Masayuki
Ito Ban
Nishide Daisuke
Matsumoto Takashi
Isobayashi Atsunobu
Suzuki Mariko
Sakata Atsuko
Watanabe Masahito
Sakuma Naoshi
Sakai Tadashi
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A highly reliable Cu interconnect with CuSiN and Ti-based barrier metal: Impact of oxgen surface treatment
2011
Hayashi Yumi
Matsunaga Noriaki
Wada Makoto
Nakao Shinichi
Watanabe Kei
Kato Satoshi
Sakata Atsuko
Kajita Akihiro
Shibata Hideki
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Low resistive and highly reliable copper interconnects in combination of silicide-cap with Ti-barrier for 32 nm-node and beyond
2010
Hayashi Yumi
Matsunaga Noriaki
Wada Makoto
Nakao Shinichi
Sakata Atsuko
Watanabe Kei
Shibata Hideki
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