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A. Vaglio Pret
A. Vaglio Pret
Katholieke Universiteit Leuven
Extreme ultraviolet lithography
Electronic engineering
Computer science
Smoothing
Error detection and correction
4
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16
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Opportunities and challenges in device scaling by the introduction of EUV lithography
2012
IEDM | International Electron Devices Meeting
K. Ronse
P. De Bisschop
Geert Vandenberghe
Eric Hendrickx
Roel Gronheid
A. Vaglio Pret
Arindam Mallik
Diederik Verkest
An Steegen
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Bridging Lithography Processes with NAND Flash ECC Complexity
2011
IMW | International Memory Workshop
P. Poliakov
Pieter Blomme
A. Vaglio Pret
M. Miranda Corbalan
J. Van Houdt
Wim Dehaene
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Roughness analysis for EUV lithography
2010
A. Vaglio Pret
P. Poliakov
D. Bianche
Roel Gronheid
Pieter Blomme
M. Miranda Corbalan
J. Van Houdt
Wim Dehaene
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