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Samson Edmond
Samson Edmond
Université Paris-Saclay
Plasma etching
Materials science
Deep reactive-ion etching
Etching
Reactive-ion etching
3
Papers
13
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Screening of spherical moulds manufactured isotropically in plasma etching conditions
2021
Contributions To Plasma Physics
Etienne Herth
Djaffar Belharet
Samson Edmond
David Bouville
Laurent Robert
Franck Lardet‐Vieudrun
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Micro/Nanopillars for Micro‐ and Nanotechnologies Using Inductively Coupled Plasmas
2019
Physica Status Solidi (a)
Etienne Herth
Samson Edmond
David Bouville
Jean Luc Cercus
Fabien Bayle
Edmond Cambril
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Fast ultra-deep silicon cavities: Toward isotropically etched spherical silicon molds using an ICP-DRIE
2019
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
E. Herth
Maciej Baranski
Djaffar Berlharet
Samson Edmond
David Bouville
Laurie E. Calvet
Christophe Gorecki
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Citations (8)
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