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Jean Luc Cercus
Jean Luc Cercus
Université Paris-Saclay
Physics
Plasma
Nanotechnology
Condensed matter physics
Plasma etching
1
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5
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Micro/Nanopillars for Micro‐ and Nanotechnologies Using Inductively Coupled Plasmas
2019
Physica Status Solidi (a)
Etienne Herth
Samson Edmond
David Bouville
Jean Luc Cercus
Fabien Bayle
Edmond Cambril
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Citations (5)
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