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M. Wielunski

Technical University of Dortmund

2

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Characterization of SiOxNyHz and SiNyHz using RBS, ERDA and NRA In memoriam Priv.-Doz. Dr. Rainer P.H. Garten

1996 Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
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Dose determination of nickel implantations in silicon wafers

1991 Fresenius Journal of Analytical Chemistry
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