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Aili Ting

Sandia National Laboratories

6

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Temperature rise of the silicon mask-PMMA resist assembly during LIGA exposure

2005
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Submicron resolution of secondary radiation in LIGA polymethyl-methacrylate resist exposure

2004 Journal of Micro-nanolithography Mems and Moems
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SIMULATIONS OF BCL3/CL2/AR PLASMAS WITH COMPARISONS TO DIAGNOSTIC DATA

1998 Journal of Vacuum Science and Technology
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PROTEUS. Fortran Program to Solve 2-D Continuum Equations for Chemically Reacting Plasma

1996
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Understanding and improving materials processing through interpreting and manipulating predictive models

1994 MRS Proceedings
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Flame-centered grid transformation for numerical simulation of strained flames

1994 Combustion and Flame
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