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Yun-Gill Yim
Yun-Gill Yim
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Materials science
Acrylate
Polymer
Styrene
3
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2024
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Improvement of line edge roughness by employing new PAG
2002
Yang-Sook Kim
Yun-Hyi Kim
Sang Hyang Lee
Yun-Gill Yim
Deog-Bae Kim
Jae Hyun Kim
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Insertion effects of various acid sensitive groups into acetal-type polymer on the profile of 248-nm chemically amplified resist
2002
Yoon-Sik Chung
Hyun-Jin Kim
Sook Hee Cho
Dong-Hwal Lee
Kwang Hwyi Im
Yun-Gill Yim
Deog-Bae Kim
Jae Hyun Kim
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