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Guenther Ruhl

Infineon Technologies

35

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The integration of graphene into microelectronic devices

2017 Beilstein Journal of Nanotechnology
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Residual Metallic Contamination of Transferred Chemical Vapor Deposited Graphene

2015 ACS Nano
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Dielectric material options for integrated capacitors

2014 ECS Journal of Solid State Science and Technology
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Reduced graphene oxide and graphene composite materials for improved gas sensing at low temperature

2014 Faraday Discussions
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Properties of stacked SrTiO3/Al2O3 metal–insulator–metal capacitors

2013 Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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Properties of atomic-vapor and atomic-layer deposited Sr, Ti, and Nb doped Ta2O5 Metal–Insulator–Metal capacitors

2012 Thin Solid Films
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Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide

2012 Journal of Vacuum Science and Technology
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Electrical and Morphological Properties of ALD and AVD Grown Perovskite-Type Dielectrics and Their Stacks for Metal-Insulator-Metal Applications

2012 ECS Journal of Solid State Science and Technology
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(Invited) ALD and AVD Grown Perovskite-type Dielectrics for Metal-Insulator-Metal Applications

2011
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Metal-insulator-metal capacitors with MOCVD grown Ce-Al-O as a dielectric

2011 Microelectronic Engineering
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