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Kevin Jock
Kevin Jock
GlobalFoundries
Real-time computing
Overlay
Computer science
Metrology
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2
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2
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0
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Yield impact for wafer shape misregistration-based binning for overlay APC diagnostic enhancement
2018
David Jayez
Kevin Jock
Yue Zhou
Venugopal Govindarajulu
Zhen Zhang
Fatima Anis
Felipe Tijiwa-Birk
Shivam Agarwal
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Overlay control for 7nm technology node and beyond
2018
Nyan Aung
Woong Jae Chung
Pavan Samudrala
Haiyong Gao
Wenle Gao
Darius Brown
Guanchen He
Bono Park
Michael Hsieh
Xueli Hao
Yen-Jen Chen
Yue Zhou
DeNeil Park
Karsten Gutjahr
Ian Krumanocker
Kevin Jock
Juan Manuel Gomez
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