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Amy Zweber
Amy Zweber
GlobalFoundries
Electronic engineering
Engineering
Lithography
Critical dimension
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7-nm e-beam resist sensitivity characterization
2016
Amy Zweber
Yusuke Toda
Yoshifumi Sakamoto
Thomas Faure
Jed H. Rankin
Steven Nash
Masayuki Kagawa
Michael Fahrenkopf
Takeshi Isogawa
Richard Wistrom
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Citations (4)
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