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B. Mayr-Schmoelzer
B. Mayr-Schmoelzer
Tungsten carbide
Corrosion
Tungsten
Boride
Boron
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Improving Material Choices for Advanced Semiconductor Processing
2016
Th. Werninghaus
B. Mayr-Schmoelzer
M. O’Sullivan
F. Schaper
D. Hacker
Michael Reilly
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