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E. V. Danilkin
E. V. Danilkin
IMEC
Plasma processing
Plasma
Analytical chemistry
Electronic engineering
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Effect of quartz window temperature on plasma composition during STI etch
2008
E. V. Danilkin
Denis Shamiryan
Mikhail R. Baklanov
A. P. Milenin
W. Boullart
G Krasnikov
O Gutshin
A. I. Mochalov
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