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A. P. Milenin

IMEC

5

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4

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Investigation of the impact of plasma etching steps on the roughness of the fin FET channel sidewalls in the scheme of hetero-integration

2016 Russian Microelectronics
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Depth loading study in STI

2016 CSTIC | China Semiconductor Technology International Conference
- Yang Song
- A. P. Milenin
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Integration aspects of strained Ge pFETs

2014 Solid-state Electronics
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Study on metrology of ERU tuning in TCP reactor, using PVx2 sensor wafer

2010 ASMC | Advanced Semiconductor Manufacturing Conference
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