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Hans H. Funke

Advanced Technology Center

5

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104

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Impurities in hydride gases. Part 2: Investigation of trace CO2 in the liquid and vapor phases of ultra-pure ammonia

2004 Journal of Electronic Materials
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Techniques for the measurement of trace moisture in high-purity electronic specialty gases

2003 Review of Scientific Instruments
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Trace water detection in semiconductor-grade phosphine gas

2002
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Impurities in hydride gases part I: investigation of trace moisture in the liquid and vapor phase of ultra-pure ammonia by FTIR spectroscopy

2001 Journal of Electronic Materials
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Trace moisture detection in corrosive gases using quadrupole mass spectroscopy

2000 LEOS | Lasers and Electro-Optics Society Meeting
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