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Hidekazu Takekoshi
Hidekazu Takekoshi
Electronic engineering
Optics
Nanoimprint lithography
Lithography
Engineering
5
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17
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The latest trend in Electron Beam Mask Writer
2015
The Japan Society of Applied Physics
Hidekazu Takekoshi
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Writing time estimation of EB mask writer EBM-9000 for hp16nm/logic11nm node generation
2014
Takashi Kamikubo
Hidekazu Takekoshi
Munehiro Ogasawara
Hirokazu Yamada
Kiyoshi Hattori
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EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond
2014
Hidekazu Takekoshi
Takahito Nakayama
Kenichi Saito
Hiroyoshi Ando
Hideo Inoue
Noriaki Nakayamada
Takashi Kamikubo
Rieko Nishimura
Yoshinori Kojima
Jun Yashima
Akihito Anpo
Seiichi Nakazawa
Tomohiro Iijima
Kenji Ohtoshi
Hirohito Anze
Victor Katsap
Steven D. Golladay
Rodney A. Kendall
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Citations (9)
EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond
2011
Hidekazu Takekoshi
Takahito Nakayama
Kenichi Saito
Hiroyoshi Ando
Hideo Inoue
Noriaki Nakayamada
Takashi Kamikubo
Rieko Nishimura
Yoshinori Kojima
Jun Yashima
Akihito Anpo
Seiichi Nakazawa
Tomohiro Iijima
Kenji Ohtoshi
Hirohito Anze
Victor Katsap
Steven Douglas Golladay
Rodney A. Kendall
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Citations (5)
Photodissociation of Iodobenzene and Photoacoustic Detection of the Products Using a Dual-Purpose Q-switched YAG Laser.
1996
Japanese Journal of Applied Physics
Hidekazu Takekoshi
Shigeo Hayashi
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