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Ludovic Godet
Ludovic Godet
Plasma
Analytical chemistry
Ion
Chemistry
Atomic physics
4
Papers
31
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Développement d'un procédé de dopage de matériaux semi-conducteurs par plasma : caractérisation du plasma et de son interaction avec les matériaux
2006
Ludovic Godet
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Plasma implanted ultra shallow junction boron depth profiles: Effect of plasma chemistry and sheath conditions
2006
Journal of Vacuum Science & Technology B
Steve Walther
Ludovic Godet
Temel Buyuklimanli
John Weeman
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Citations (7)
Ion energy distributions in a pulsed plasma doping system
2005
Journal of Applied Physics
Svetlana Radovanov
Ludovic Godet
Rajesh Dorai
Z. Fang
Bon-Woong Koo
Christophe Cardinaud
Gilles Cartry
D. Lenoble
A. Grouillet
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Citations (19)
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