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Svetlana Radovanov
Svetlana Radovanov
Electron temperature
Doping
Langmuir probe
Plasma
Ion implantation
1
Papers
19
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Ion energy distributions in a pulsed plasma doping system
2005
Journal of Applied Physics
Svetlana Radovanov
Ludovic Godet
Rajesh Dorai
Z. Fang
Bon-Woong Koo
Christophe Cardinaud
Gilles Cartry
D. Lenoble
A. Grouillet
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Citations (19)
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