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Jay Chey
Jay Chey
IBM
Optics
Selectivity
Laser
Lithography
Phase (waves)
3
Papers
29
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Finite size effects in stress analysis of interconnect structures
2004
Applied Physics Letters
I. C. Noyan
Conal E. Murray
Jay Chey
Charles Goldsmith
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Performance data on new tunable attenuating PSM for 193-nm and 157-nm lithography
2004
Hans Willy Becker
Frank Schmidt
Frank Sobel
Markus Renno
Ute Buttgereit
Jay Chey
Marie Angelopoulos
Konrad Knapp
Günter Hess
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Development of a new PSM film system for 157-nm extensible to high-transmission 193 nm lithography
2003
Hans Willy Becker
Jay Chey
Frank Sobel
Frank Schmidt
Markus Renno
Ute Buttgereit
Marie Angelopoulos
Guenter Hess
Konrad Knapp
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Citations (3)
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