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Soichi Yamazaki
Soichi Yamazaki
Chemical vapor deposition
Chemistry
Capacitor
Inorganic chemistry
Sputtering
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Ultrathin Ta2 O 5 Film Capacitor with Ru Bottom Electrode
1998
Journal of The Electrochemical Society
Tomonori Aoyama
Soichi Yamazaki
Keitaro Imai
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Citations (32)
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