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Sascha Monje
Sascha Monje
Ruhr University Bochum
Analytical chemistry
High-power impulse magnetron sputtering
Physics
Plasma
Cavity magnetron
5
Papers
22
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Velocity distribution of metal ions in the target region of HiPIMS: the role of Coulomb collisions
2020
Plasma Sources Science and Technology
J. Held
Sascha Monje
Achim von Keudell
Volker Schulz-von der Gathen
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Connection between target poisoning and current waveforms in reactive high-power impulse magnetron sputtering of chromium
2018
Plasma Sources Science and Technology
Vincent Layes
Carles Corbella
Sascha Monje
Volker Schulz-von der Gathen
Achim von Keudell
Teresa de los Arcos
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Species transport on the target during high power impulse magnetron sputtering
2017
Applied Physics Letters
Vincent Layes
Sascha Monje
Carles Corbella
Jan Trieschmann
T. de los Arcos
A. von Keudell
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Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics
2017
Journal of Applied Physics
Vincent Layes
Sascha Monje
Carles Corbella
Volker Schulz-von der Gathen
Achim von Keudell
Teresa de los Arcos
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Elementary surface processes during reactive magnetron sputtering of chromium
2015
Journal of Applied Physics
Sascha Monje
Carles Corbella
Achim von Keudell
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Citations (6)
1