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Velocity distribution of metal ions in the target region of HiPIMS: the role of Coulomb collisions
Velocity distribution of metal ions in the target region of HiPIMS: the role of Coulomb collisions
2020
J. Held
Sascha Monje
Achim von Keudell
Volker Schulz-von der Gathen
Keywords:
Metal ions in aqueous solution
Atomic physics
Coulomb
High-power impulse magnetron sputtering
Materials science
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