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Frank Katzwinkel
Frank Katzwinkel
Infineon Technologies
Photomask
Electronic engineering
Scheduling (production processes)
Mathematics
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2
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9
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193-nm immersion photomask image placement in exposure tools
2006
Eric Cotte
Benjamin Alles
Timo Wandel
Gunter Antesberger
Silvio Teuber
Manuel Vorwerk
Andreas Frangen
Frank Katzwinkel
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Citations (9)
A method of extending of limitations for feature sizes in the production process of photomasks
2004
Nina Doehr
Henning Haffner
Bernd Hay
Carmen Jaehnert
Frank Katzwinkel
Peter Marek
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