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Marcella Johanna Hartl
Marcella Johanna Hartl
Infineon Technologies
Composite material
Materials science
Ion implantation
Dry etching
Reactive-ion etching
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Investigation on wet etching 4H-SiC damaged by ion implantation
2016
Materials Science Forum
Sophie Guillemin
Romain Esteve
Christian Heidom
Gerald Unegg
Gerald Reinwald
Marcella Johanna Hartl
Daniel Kueck
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A process for producing a semiconductor device having a dielectric structure
2013
Gerhard Schmidt
Daniel Schlögl
Marcella Johanna Hartl
Philipp Sebastian Koch
Roland Strasser
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